Finfet including tunable fin height and tunable fin width ratio

ABSTRACT

A semiconductor substrate includes a bulk substrate layer that extends along a first axis to define a width and a second axis perpendicular to the first axis to define a height. A plurality of hetero semiconductor fins includes an epitaxial material formed on a first region of the bulk substrate layer. A plurality of non-hetero semiconductor fins is formed on a second region of the bulk substrate layer different from the first region. The non-hetero semiconductor fins are integrally formed from the bulk substrate layer such that the material of the non-hetero semiconductor fins is different from the epitaxial material.

DOMESTIC PRIORITY

This application is a divisional of U.S. patent application Ser. No.14/583,842, filed Dec. 29, 2014, which is a non-provisional of U.S.Patent Application Ser. No. 61/976,008, filed Apr. 7, 2014, thedisclosures of which are incorporated by reference herein in theirentireties.

BACKGROUND

The present invention relates to complimentary metal oxide semiconductor(CMOS) devices, and more specifically, to CMOS devices including a PFEThaving a hetero channel.

Conventional CMOS devices typically include one or more pairs ofcomplementary and symmetrical p-type field effect transistors (pFETs)and n-type field effect transistors (nFETs) for providing high noiseimmunity and low static power consumption. CMOS devices utilizingsemiconductor devices including one or more semiconductor fins (i.e.,FinFETs) can realize an improvement in device performance. Adjusting thefin height and/or fin width may also control current output provided bythe FinFET. Forming one or more hetero fins (e.g., fins formed fromsilicon germanium on a silicon substrate) corresponding to a p-typeFinFET results in higher hole mobility through the fin due to the lighthole effective mass. However, fabricating CMOS devices including bothhetero channels and non-hetero channels require additional masking andetching processes that result in an overall complex and expensivefabrication process.

SUMMARY

According to at least one embodiment, a method of fabricating asemiconductor device comprises forming a semiconductor substrate thatextends along a first axis to define a width and a second axisperpendicular to the first axis to define a height. The semiconductorsubstrate includes a bulk substrate layer and a hardmask layer formed onthe bulk substrate layer. A plurality of oxide elements and high-kelements are formed on the hardmask layer. The plurality of oxideelements and high-k elements are arranged in an alternating series thatextends along the width and between opposing ends of the semiconductorsubstrate. The method further comprises removing a first portion of theoxide elements located in a first region of the semiconductor substratesuch that a cavity is formed between pairs of high-k elements whilemaintaining a second portion of the oxide elements located in a secondregion of the semiconductor substrate. The method further includesextending a depth of each cavity to form a plurality of extendedcavities in the bulk substrate layer. The method further includesgrowing an epitaxial material on portions of semiconductor substrateexposed by the cavities to form hetero semiconductor channels having afirst width in the first region.

According to another exemplary embodiment, a semiconductor substrateincludes a bulk substrate layer that extends along a first axis todefine a width and a second axis perpendicular to the first axis todefine a height. A plurality of hetero semiconductor fins includes anepitaxial material formed on a first region of the bulk substrate layer.A plurality of non-hetero semiconductor fins is formed on a secondregion of the bulk substrate layer different from the first region. Thenon-hetero semiconductor fins are integrally formed from the bulksubstrate layer such that the material of the non-hetero semiconductorfins is different from the epitaxial material.

Additional features are realized through the techniques of the presentinvention. Other embodiments are described in detail herein and areconsidered a part of the claimed invention. For a better understandingof the invention with the features, refer to the description and to thedrawings.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

The subject matter which is regarded as the invention is particularlypointed out and distinctly claimed in the claims at the conclusion ofthe specification. The forgoing features are apparent from the followingdetailed description taken in conjunction with the accompanying drawingsin which:

FIG. 1 illustrates a starting semiconductor substrate including ahardmask layer interposed between an oxide layer and a bulk substratelayer;

FIG. 2 illustrates the semiconductor substrate of FIG. 1 following apatterning process that forms a plurality of trenches in the oxidelayer;

FIG. 3 illustrates the semiconductor substrate of FIG. 2 afterdepositing a high-k block layer on an upper surface of the hardmasklayer to fill the trenches and cover the remaining portions of the oxidelayer;

FIG. 4 illustrates the semiconductor substrate of FIG. 3, following aplanarization process that recesses the high-k layer to be flush with anupper surface of the remaining portions of the oxide layer;

FIG. 5 illustrates the semiconductor substrate of FIG. 4 afterpatterning a masking layer formed on the upper surface of thesemiconductor substrate to expose a pFET region;

FIG. 6 illustrates the semiconductor substrate of FIG. 5 followingremoval of the remaining portions of the oxide layer from the pFETregion to form respective cavities;

FIG. 7 illustrates the semiconductor substrate of FIG. 6 after removingthe masking layer and following deposition of a conformal spacer layeron an upper surface of the semiconductor substrate;

FIG. 8 illustrates the semiconductor substrate of FIG. 7 after etchingthe conformal spacer layer to form spacers on sidewalls of the cavities;

FIG. 9 illustrates the semiconductor substrate of FIG. 8 after extendingthe cavities into the bulk substrate layer;

FIG. 10 illustrates the semiconductor substrate of FIG. 9 following anepitaxial growth process to grow epitaxial material in the extendedcavities;

FIG. 11 illustrates the semiconductor substrate of FIG. 10 followingdeposition of a second oxide layer that fills the cavities and coversthe epitaxial material;

FIG. 12 illustrates the semiconductor substrate of FIG. 11 following aplanarization process that recesses the second oxide layer to be flushwith upper surfaces of the high-k elements;

FIG. 13 illustrates the semiconductor substrate of FIG. 12 followingremoval of the high-k elements from the upper surface of thesemiconductor substrate to form a plurality of voids;

FIG. 14 illustrates the semiconductor substrate of FIG. 13 following anetching process that extends the voids into the bulk substrate layer toform a plurality of non-hetero fins at the nFET region and a pluralityof hetero fins at the pFET region;

FIG. 15 illustrates the semiconductor substrate of FIG. 14 afterremoving remaining portions of the second oxide layer from the uppersurface of the non-hetero fins;

FIG. 16 illustrates the semiconductor substrate of FIG. 15 afterremoving remaining portions of the second oxide layer from the uppersurface of the hetero fins to define a plurality of hetero fins having afirst height and first width and after removing remaining portions ofthe hardmask layer from the upper surface of the non-hetero fins todefine a plurality of non-hetero fins having a second height and secondwidth;

FIG. 17 illustrates a semiconductor substrate according to anotherembodiment following patterning of a masking layer to expose a pFETregion of the semiconductor device;

FIG. 18 illustrates the semiconductor substrate of FIG. 17 followingremoval of the first oxide layer and after forming cavities that extendinto a bulk substrate layer of the semiconductor substrate;

FIG. 19 illustrates the semiconductor substrate of FIG. 18 following anetching process to increase the width of the cavities;

FIG. 20 illustrates the semiconductor substrate of FIG. 19 following anepitaxial growth process to grow epitaxial material in the cavities;

FIG. 21 illustrates the semiconductor substrate of FIG. 20 followingdeposition of a hardmask layer in the cavities and on an upper surfaceof the epitaxial material;

FIG. 22 illustrates the semiconductor substrate of FIG. 21 followingremoval of high-k elements from the upper surface of the semiconductordevice to form a plurality of voids;

FIG. 23 illustrates the semiconductor substrate of FIG. 22 following anetching process that extends the voids into the bulk substrate layer toform a plurality of non-hetero fins at the nFET region and a pluralityof hetero fins at the pFET region;

FIG. 24 illustrates the semiconductor substrate of FIG. 23 afterremoving remaining portions of a hardmask layer from the upper surfaceof the hetero fins and non-hetero fins to define a plurality of heterofins having a first height and first width and a plurality of non-heterofins having a second height and second width;

FIG. 25 illustrates a semiconductor substrate including a epitaxialmaterial having a first width grown in a plurality of cavities formed ina bulk substrate layer corresponding to a pFET region of thesemiconductor substrate according to another embodiment;

FIG. 26 illustrates the semiconductor substrate of FIG. 25 following anetching process that forms a plurality of voids in the bulk substratelayer and that trims sidewall portions of the epitaxial material; and

FIG. 27 illustrates the semiconductor substrate of FIG. 26 afterremoving remaining portions of a hardmask layer from the upper surfaceof the non-hetero fins and the hetero fins to define a plurality ofhetero fins with trimmed sidewalls having a first height and a pluralityof non-hetero fins having a second height.

DETAILED DESCRIPTION

With reference now to FIG. 1, a starting semiconductor substrate 100having one or more nFET regions 102 and one or more pFET regions 104 isgenerally indicated. The semiconductor substrate 100 may extend along afirst axis (e.g., X-axis) to define a width, and a second axis (e.g.,Y-axis) perpendicular to the X-axis to define a height. Although notillustrated in FIG. 1, it is appreciated that the semiconductor devicemay also extend along a third axis (e.g., Z-axis) to define a length.

The starting substrate 100 includes a bulk substrate layer 106, ahardmask layer 108, and a first sacrificial layer 110. The bulksubstrate layer 106 may be formed from various semiconductor materialssuch as, for example, silicon. The hardmask layer 108 is formed on anupper surface of the bulk substrate layer 106. The hardmask layer 108may be formed from various materials including, but not limited to,silicon nitride (SiN). The first oxide layer 110 may be comprise oxide,for example, to form a first oxide layer 110. The first oxide layer 110is formed on an upper surface of the hardmask layer 106. Accordingly,the hardmask layer 108 is interposed between the bulk substrate layer106 and the first oxide layer 110. The first oxide layer 110 may beformed from, for example, silicon oxide (SiO₂). Although thesemiconductor substrate 100 is illustrated as a bulk substrate, it isappreciated that the semiconductor substrate 100 may be formed as asemiconductor-on-insulator (SOI) substrate as understood by thoseordinarily skilled in the art.

Referring to FIG. 2, the first oxide layer 110 is patterned to form aplurality of oxide elements 110′ separated from one another by arespective trench 112. A sidewall image transfer (SIT) process using apatterned masking layer formed on the first oxide layer 110 may be usedto form the trenches 112 in the first oxide layer 108 as understood bythose ordinarily skilled in art. Accordingly, the trenches 112 exposethe underlying hardmask layer 108 between remaining portions of thefirst oxide elements 110′.

Referring to FIG. 3, the semiconductor substrate 100 is illustratedafter depositing a second sacrificial layer 114 block layer 114 on anupper surface of the hardmask layer 108 to fill the trenches 112 andcover the first oxide elements 110′. The second sacrificial layer 114may comprise various materials including, but not limited to, hafniumoxide (HfO₂) and aluminum oxide (Al₂O₃), to form a high-dialectic(high-k) block layer 114.

Referring to FIG. 4, the semiconductor substrate 100 is illustratedfollowing a planarization process such as a chemical mechanicalplanarization (CMP) process, for example, that recesses the high-k layer114. In this regard, a high-k element 114′ is formed in a respectivetrench 112. Accordingly, each first dielectric element 110′ isinterposed between a pair of high-k elements 114′. The planarizationprocess may stop on an upper surface of the first oxide elements 110′.In this regard, an upper surface of the high-k elements 114′ is flushwith an upper surface of the first oxide elements 110′.

Turning to FIG. 5, the semiconductor substrate 100 is illustrated afterpatterning a masking layer 116 formed on the upper surface of thesemiconductor substrate 100. According to at least one exemplaryembodiment, the masking layer 116 is patterned according to alithography process. In this regard, the first oxide elements 110′ andthe high-k elements 114′ corresponding to the pFET region 104 may beexposed while the first oxide elements 110′ and the high-k elements 114′corresponding to the nFET region 102 remain covered. The masking layer116 may comprise various materials including, but not limited to, aphotoresist material and an optical planarization layer as understood byone of ordinary skill in the art.

Referring to FIG. 6, the first oxide elements 110′ are removed from thepFET region 104. Accordingly, cavities 118 that expose the underlyinghardmask layer 108 are interposed between pairs of high-k elements 114′.The first oxide elements 110′ corresponding to the pFET region may beremoved using, for example, a vapor hydrogen fluoride (VHF) etchingprocess that is selective to the high-k elements 114′, the underlyinghardmask layer 108 of the pFET region 104, and the remaining maskinglayer 116 of the nFET region 102.

Turning now to FIG. 7, the remaining portion of masking layer 116 isremoved from the nFET region 102, and a conformal spacer layer 120 isdeposited on an upper surface of the nFET region 102 and pFET region 104of the semiconductor substrate 100. With respect to the nFET region 102,the conformal spacer layer 120 covers the upper surface of the high-kelements 114′ and the first oxide elements 110′. With respect to thepFET region 104, the conformal spacer layer 120 is formed on the uppersurface of the hardmask layer 108 exposed by the cavities 118, and thesidewalls and upper surface of the high-k elements 114′. The conformalspacer layer 120 may be formed from various materials including, but notlimited to, SiN.

Referring to FIG. 8, the conformal spacer layer 120 is etched to formindividual spacers 122 on the sidewalls of the high-k elements 114′exposed by the cavities 118 corresponding to the pFET region 104. Asidewall image transfer (SIT) process that is selective to both thematerial of the high-k elements 114′ and the material of the first oxideelements 110′ may be used. In this regard, the conformal spacer layer120 is removed from the upper surfaces of the first oxide elements 110′and the high-k elements 114′ of the nFET region 102. With respect to thepFET region 104, the conformal spacer layer 120 is removed from theupper surface of the high-k elements 114′ and the upper surface of thehardmask layer 108. Accordingly, the spacers 122 are formed on thesidewalls of the high-k elements 114′ exposed by the cavities 118.

Turning to FIG. 9, the depth of the cavities 118 is increased such thatextended cavities 118′ are formed through the hardmask layer 108 andinto the bulk substrate layer 106. The width (d_(C)) of the extendedcavities 118′ may be controlled by the distance between a pair ofspacers 122 corresponding to a respective extended cavity 118′. Theextended cavities 118′ may be formed using a two-step etching process. Afirst etching process may be used to etch the hardmask layer 108 andexpose the underlying bulk substrate layer 106, and a second etchingprocess may be used to etch bulk substrate layer 106 and extend thecavities 118′ therethrough. The first etching process may include a dryetching process comprising carbon tetrafluoromethane (CF₄) with theaddition of oxygen (O₂), for example. The added O₂ may induce oxidationat the surface of the bulk substrate layer 106 such that the decrease inthe etch rate of bulk substrate occurs. Accordingly, the first etchingprocess may etch the hardmask layer 108 while being selective to theunderlying bulk substrate layer 106. The second etching process mayinclude a dry etching process that consists of carbon tetrafluoromethane(CF₄), for example. Various other etching processes, however, may beused to extend the cavities 118′ through the hardmask layer 108 and intothe bulk substrate layer 106 as understood by those ordinarily skilledin the art.

Turning now to FIG. 10, an epitaxial material (epi) 124 is grown on thesurfaces of the bulk substrate layer 106 exposed by the extendedcavities 118′. According to one exemplary embodiment, the epi 124comprises silicon germanium (SiGe), which is grown from the exposedsurfaces of the bulk substrate layer 106 and fills the cavities 118′.The epi 124 (e.g., SiGe) forms a respective hetero semiconductor element(i.e., hetero fin) corresponding to the pFET region 104 of thesemiconductor device 100, as discussed in greater detail below. Thewidth of the epi 124 (i.e., the hetero channel) is based on the width(d_(C)) of a respective extended cavity 118′. In addition, the height ofthe epi 124 may be controlled according to the amount epi 124 grownwithin the extended cavities 118′. Accordingly, a feature of adjusting aheight of a hetero semiconductor fin may be provided is discussed ingreater detail below.

Turning to FIG. 11, a third sacrificial layer 126 is deposited on thesemiconductor device 100. The third sacrificial layer 126 may compriseof oxide, for example, to form a second oxide layer 126. With respect tothe nFET region 102, the second oxide layer 126 is formed on an uppersurface of the high-k elements 114′ and the first oxide elements 110′.With respect to the pFET region 104, the second oxide layer 126 isformed on an upper surface of the high-k elements 114′ and fills theextended cavities 118′ to cover the epi 124. The second oxide layer 126may be formed from various materials including, for example, SiO₂.

Referring to FIG. 12, the second oxide layer 126 corresponding to thenFET region 102 and the pFET region 104 is recessed. Accordingly, secondoxide elements 126′ are formed between pairs of high-k elements 114′. Achemical mechanical planarization (CMP) process may recess the secondoxide layer 126 while stopping on upper surfaces of the high-k elements114′. With respect to the pFET region 104, an upper surface of thesecond oxide layer 126 that fills a respective cavity 118′ is flush withan upper surface of the high-k elements 114′.

Turning now to FIG. 13, the high-k elements 114′ corresponding to thenFET region 102 and the pFET 104 are removed. Accordingly, voids 130 areformed between pairs of first oxide elements 110′ corresponding to thenFET region 102 and also between pairs of second oxide elements 126′corresponding to the pFET region 104. Various etching process may beused to remove the high-k elements 114′. For example, a wet etchingprocess comprising a combination of hydrochloric acid (HCl) and sulfuricacid (H₂SO₄) may etch away the high-k elements 114′ while beingselective to the first oxide elements 110′ corresponding to the nFETregion 102, second oxide elements 126′ corresponding to the pFET region104 and the hardmask layer 108. A second spacer etching process may beperformed to remove the previously formed spacers 122. A portion of thehardmask layer 108 may also be etched when removing the spacers 122. Thesecond spacer etching process may include, for example, a dry etchingprocess that is selective to the second oxide elements 126′. The secondspacer etching process may be time-etched to control the amount ofhardmask layer 108 that is etched.

Referring to FIG. 14, the depth of each previously formed void 130 isincreased such that extended voids 130′ are formed through the hardmasklayer 108 and into the bulk substrate layer 106. The extended voids 130′may be formed using a two-step etching process. A first etching processmay be used to etch the hardmask layer 108 and expose the underlyingbulk substrate layer 106, and a second etching process may be used toetch bulk substrate layer 106 and extend the voids 130′ therethrough.The first etching process may include a dry etching process comprisingcarbon tetrafluoromethane (CF₄) with the addition of oxygen (O₂), forexample. The added O₂ may induce oxidation at the surface of the bulksubstrate layer 106 such that the decrease in the etch rate of bulksubstrate layer 106 occurs. Accordingly, the first etching process mayetch the hardmask layer 108 while being selective to the underlying bulksubstrate layer 106, the first oxide elements 110′ and the second oxideelements 126′. The second etching process may include a dry etchingprocess that consists of carbon tetrafluoromethane (CF₄), for example.In this regard, the first oxide elements 110′ and the second oxideelements 126′ may be utilized to pattern the bulk substrate layer 106.Various other etching processes, however, may be used to extend thevoids 130′ through the hardmask layer 108 and into the bulk substratelayer 106 as understood by those ordinarily skilled in the art.

As further illustrated in FIG. 14, one or more hetero semiconductorelements 132 (e.g., hetero fins 132) are formed on the bulk substratelayer 106 of the pFET region 104, and one or more non-heterosemiconductor elements 134 (e.g., non-hetero fins 134) are formed on thebulk substrate layer 106 of the nFET region 102. As described above, thehetero fins 132 may comprise SiGe, for example, and the non-hetero fins134 may comprise Si, for example. Accordingly, at least one exemplaryembodiment provides hetero fins 132 that increase electrical holemobility therethrough.

The width of the hetero fins 132 are based on the width of the heteromaterial, e.g., epi 124, formed in the extended cavities 118′ asdescribed above with respect to FIGS. 9-10. The width of the non-heterofins 134 is based on a width of the first oxide elements 110′ formed onthe upper surface of the hardmask layer 108.

Turning to FIG. 15, the first oxide elements 110′ are recessed from thenon-hetero fins 134 while stopping an upper surface of the hardmasklayer 108′. Accordingly, the remaining portions of the hardmask layer108′ formed on the non-hetero fins 134 are exposed, while a portion ofthe second oxide elements 126′ formed on an upper surface of the heterofins 132 is recessed. Various dry etching processes that are selectiveto the bulk substrate layer 106, the hetero fins 132, and the non-heterofins 134 may be used to recess the first oxide elements 110′.

Referring now to FIG. 16, the second oxide elements 126′ may be removedfrom the hetero fins 132 and the remaining portions of the hardmasklayer 108 may be removed from the non-hetero fins 134. A first dryetching process that is selective to the bulk substrate layer 106, thehardmask layer 108, the hetero fins 132, and the non-hetero fins 13, maybe used to remove the second oxide elements 126′. A second dry etchingprocess that is selective to the bulk substrate layer 106, the heterofins 132, and the non-hetero fins 134 may be used to remove the hardmasklayer 108.

As further illustrated in FIG. 16, a semiconductor device 100 is formedincluding both non-hetero fins 134 formed on a bulk substrate layer 106corresponding to the nFET region 102 and hetero fins 132 formed on thebulk substrate layer 106 corresponding to the pFET region 104. It isappreciated, however, that hetero fins may be formed in the nFET region102 and non-hetero fins may be formed in the pFET region 104. The heterofins 132 may have an adjustable height with respect to a height of thenon-hetero fins 134. For example, the hetero fins 132 may have a firstheight (h₁) while the non-hetero fins 134 may have a second height (h₂)that is greater than the first height (h₁). Accordingly, a heightdifferential (Δ_(h)) may be defined between the non-hetero fins 134 andthe hetero fins 132. It is appreciated, however, that the height of thehetero fins 132 may be greater than the height of the non-hetero fins134.

The hetero fins 132 may also have an adjustable width with respect to awidth of the non-hetero fins 134. For example, the hetero fins 132 mayhave a first width (w_(H)) while the non-hetero fins 134 may have asecond width (w_(NH)) that is greater than the first width (w_(H)). Itis appreciated, however, that the width of the hetero fins 132 may begreater than the width of the non-hetero fins 134. Accordingly, anadjustable width ratio between the width (w_(NH)) of the non-hetero fins134 and the width (w_(H)) of the hetero fins 132 may be defined. In thisregard, the current output of a pFET may be tuned (i.e., may have adifferent current output) with respect to the current output of an nFET.According to one exemplary embodiment, a pFET including heterosemiconductor fins and an nFET including non-hetero semiconductor finsmay form pull-up/pull-down transistors configured to perform write/readoperations more quickly for SRAM applications.

Turning now to FIGS. 17-24, a process flow for fabricating asemiconductor device 100 is illustrated according to another exemplaryembodiment. With regards to FIG. 17, the starting semiconductorsubstrate 100 includes a bulk substrate layer 106 and a hardmask layer108 formed on an upper surface of the bulk substrate layer 106 (similarto the point of processing as shown in FIG. 5 of the first embodiment).Although the semiconductor substrate 100 is illustrated as bulksemiconductor substrate, it is appreciated that the semiconductorsubstrate 100 may be formed as an SOI substrate as understood by thoseordinarily skilled in the art. An alternating series of oxide elements110′ and high-k elements 114′ are formed on an upper surface of thehardmask layer 108 as described in detail above. The semiconductorsubstrate 100 is further illustrated following patterning of maskinglayer 106 to expose a pFET region 104 of the semiconductor substrate100.

Referring to FIG. 18, first oxide elements corresponding to the pFETregion 104 are removed and extended cavities 118′ are formed between thehigh-k elements 114′. The depth of the cavities 118′ extend through thehardmask layer 108 and into the bulk substrate layer 106 as described indetail above. The extended cavities 118′ have an initial width (w₁).

Turning to FIG. 19, the extended cavities 118′ are etched laterally(i.e., perpendicular to the direction of the depth) such that the widthof the cavities 118′ is increased to define a second width (w₂). Afterincreasing the width of the cavities 118′, the remaining portion of themasking layer 116 is removed from the nFET region 102 of thesemiconductor substrate 100. A dry etching process that consists ofcarbon tetrafluoromethane (CF₄), for example, may be used to increasethe width of the cavities 118′ and enlarge the space in which epitaxialmaterial may be grown. Accordingly, the growth rate of epitaxialmaterial grown on the sides of the cavities 118′ may be reduced toimprove the uniformity at which an epi material may be grown.

Turning to FIG. 20, an epitaxial material (epi) 124 is grown on thesurfaces of the substrate layer 106 exposed by the extended cavities118′. According to one exemplary embodiment, the epi 124 comprisessilicon germanium (SiGe). The SiGe in this case, for example, forms arespective hetero semiconductor element (i.e., hetero fin) correspondingto the pFET region 104 as discussed in greater detail below. The heightof the epi 124 may be controlled according to the amount epi 124 grownwithin the extended cavities 118′.

Turning to FIG. 21, a hardmask material is deposited on an upper surfaceof the epi 124 to fill the remaining space defined by cavities 118′. Thehardmask material may be recessed to form hardmask elements 136 havingan upper surface that is flush with an upper surface of the high-kelements 114′ corresponding to the pFET region 104. Accordingly to atleast one exemplary embodiment, the material of the hardmask elements136 matches the material of the hardmask layer 108.

Turning to FIG. 22, the high-k elements 114′ corresponding to the nFETregion 102 and the pFET region 104 are removed. Accordingly, voids 130are formed between pairs of first oxide elements 110′ and also betweenpairs of hardmask elements 136. Various etching process may be used toremove the high-k elements 114′. For example, a wet etching processcomprising a combination of hydrochloric acid (HCl) and sulfuric acid(H₂SO₄) may etch away the high-k elements 114′ while being selective tothe hardmask layer 108, the first oxide elements 110′, and the hardmaskelements 136.

Turning to FIG. 23, extended voids 130′ are formed through the hardmasklayer 108 and into the bulk substrate layer 106. Accordingly, aplurality of hetero fins 132 are formed in the pFET region 104 and aplurality of non-hetero fins 134 are formed in the nFET region 102. Theoxide elements 110′ may be removed after forming the extended voids130′.

The extended voids 130′ may be formed using a two-step etching process.A first etching process may be used to etch the hardmask layer 108exposed by a respective void 130, and recess the hardmask elementsformed on the hetero fins 132. A second etching process may be used toetch the bulk substrate layer 106 and extend the voids 130′therethrough. The first etching process may include a dry etchingprocess comprising carbon tetrafluoromethane (CF₄) with the addition ofoxygen (O₂), for example. The added O₂ may induce oxidation at thesurface of the bulk substrate layer 106 such that a decrease in the etchrate of bulk substrate layer occurs 106. The first etching process mayetch the hardmask layer 108 while being selective to the underlying bulksubstrate layer 106. The second etching process may include a dryetching process that consists of carbon tetrafluoromethane (CF₄), forexample. Various other etching processes, however, may be used to extendthe voids 130′ through the hardmask layer 108 and into the bulksubstrate layer 106 as understood by those ordinarily skilled in theart.

Still referring to FIG. 23, at least one exemplary embodiment includesan excess substrate portion 138 that is formed between the hetero fins132 and the bulk substrate layer 106. The excess substrate portion 138may provide an over-etch tolerance when forming the extended voids 130′.Accordingly, an entire portion of the epi 124 may be exposed such thatthe epi 124 may be maintained during a gate stack formation process.

Referring to FIG. 24, the remaining portions of the hardmask layer 108are removed from the hetero fins 132 and the non-hetero fins 134.Although hetero fins 132 are formed in the pFET region 104 andnon-hetero fins 134 are formed in the nFET region 102, it is appreciatedthat the hetero fins 132 may be formed in the nFET region 102 and thenon-hetero fins 134 may be formed in the pFET region 104. As describedabove, the hetero fins 132 may be formed of SiGe, for example, and thenon-hetero fins 134 may be formed from Si, for example. Accordingly, atleast one exemplary embodiment provides hetero fins 132 that increaseelectrical hole mobility therethrough.

The width (w_(H)) of the hetero fins 132 are based on the width of thehetero material, e.g., SiGe epi 124, formed in the extended cavities130′ as described above with respect to FIGS. 9-10. The width of thenon-hetero fins 134 are based on a width of the first oxide elements110′ formed on the upper surface of the hardmask layer 108 as describedin detail above.

The hetero fins 132 may also have an adjustable height with respect to aheight of the non-hetero fins 134 as further illustrated in FIG. 24. Forexample, the hetero fins 132 may have a first height (h₁) that extendsbetween an upper surface of the epi 124 and an upper surface of theexcess substrate portion 138. The non-hetero fins 134 may have a secondheight (h₂) that extends between an upper surface of the non-hetero fin134 and the base of the bulk substrate layer 106. The second height (h₂)of the non-hetero fins 134 may be greater than the first height (h₁) ofthe hetero fins 132. Accordingly, a height differential (Δ_(h)) may bedefined between the non-hetero fins 134 and the hetero fins 132. It isappreciated, however, that the height of the hetero fins 132 may begreater than the height of the non-hetero fins 134.

Turning now to FIGS. 25-27, a process flow for fabricating asemiconductor device is illustrated according to another exemplaryembodiment. Referring to FIG. 25, a starting semiconductor substrate 100includes a bulk substrate layer 106 and a hardmask layer 108 formed onan upper surface of the bulk substrate layer 106. Although thesemiconductor substrate 100 is illustrated as bulk semiconductorsubstrate, it is appreciated that the semiconductor substrate 100 may beformed as an SOI substrate as understood by those ordinarily skilled inthe art. A plurality of oxide elements 110′ are formed on an uppersurface of the hardmask layer 108 corresponding to the nFET region 102.With respect to the pFET region 104, a plurality of hardmask elements136 are formed on an upper surface of epi grown material (epi) 124. Theepi 124 has an initial width (w_(H1)). During the epi growth process,damaged portions 140 may form on the sidewalls of the epi 124. Initialvoids 130 are formed between pairs of the oxide elements 110′ and thehardmask elements 136. The oxide elements 110′, hardmask elements 136,the epi grown material 124, and the initial voids 130 may be formedaccording to the various operations described in detail above.

Referring to FIG. 26, the oxide elements 110′ are removed and the depthof the initial voids may be extended through the hardmask layer 108 andinto the bulk substrate layer 106. According to at least one exemplaryembodiment, sidewalls of the epi 124 may be trimmed as a result offorming the extended voids 130′ into the bulk substrate layer 106. Inthis regard, the damaged portions 140 may be removed and the width ofthe epi 124 may be reduced to define a second width (w_(H2)). The secondwidth (w_(H2)) of the hetero fins 132 may be equal or approximatelyequal to the width (w_(NH)) of the non-hetero fins 134, for example, ormay have a different width with respect to the width of the non-heterofins 134.

Turning to FIG. 27, the remaining portion of the hardmask layer 108and/or the hardmask elements 136 are removed from the upper surface ofthe hetero fins 132 and the non-hetero fins 134. Accordingly, asemiconductor device 100 including both non-hetero fins 134 and heterofins 132 excluding damaged epi sidewall portions may be provided. Thehetero fins 132 may also have an adjustable height with respect to aheight of the non-hetero fins 134 as further illustrated in FIG. 27. Forexample, the hetero fins 132 may have a first height (h₁) that extendsbetween an upper surface of the epi 124 and an upper surface of theexcess substrate portion 138. The non-hetero fins 134 may have a secondheight (h₂) that extends between an upper surface of the non-hetero fin134 and the base of the bulk substrate layer 106. The second height (h₂)of the non-hetero fins 134 may be greater than the first height (h₁) ofthe hetero fins 132. Accordingly, a height differential (Δ_(h)) may bedefined between the non-hetero fins 134 and the hetero fins 132. It isappreciated, however, that the height of the hetero fins 132 may begreater than the height of the non-hetero fins 134.

The terminology used herein is for the purpose of describing exemplaryembodiments only and is not intended to be limiting of the invention. Asused herein, the singular forms “a”, “an” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise. It will be further understood that the terms “comprises”and/or “comprising,” when used in this specification, specify thepresence of stated features, integers, steps, operations, elements,and/or components, but do not preclude the presence or addition of onemore other features, integers, steps, operations, element components,and/or groups thereof.

The corresponding structures, materials, acts, and equivalents of allmeans or step plus function elements in the claims below are intended toinclude any structure, material, or act for performing the function incombination with other claimed elements as specifically claimed. Thedescription of the present invention has been presented for purposes ofillustration and description, but is not intended to be exhaustive orlimited to the invention in the form disclosed. Many modifications andvariations will be apparent to those of ordinary skill in the artwithout departing from the scope and spirit of the invention. Theembodiment was chosen and described in order to best explain theprinciples of the inventive teachings and the practical application, andto enable others of ordinary skill in the art to understand theinvention for various embodiments with various modifications as aresuited to the particular use contemplated.

The flow diagrams depicted herein are just one example. There may bemany variations to this diagram or the operations described thereinwithout departing from the spirit of the invention. For instance, theoperations may be performed in a differing order or operations may beadded, deleted or modified. All of these variations are considered apart of the claimed invention.

While various embodiments have been described, it will be understoodthat those skilled in the art, both now and in the future, may makevarious modifications which fall within the scope of the claims whichfollow. These claims should be construed to maintain the properprotection for the invention first described.

What is claimed is:
 1. A semiconductor device, comprising: asemiconductor substrate including a bulk substrate layer that extendsalong a first axis to define a width and a second axis perpendicular tothe first axis to define a height; at least one hetero semiconductor finincluding an epitaxial material on a first region of the bulk substratelayer; and at least one non-hetero semiconductor fin on a second regionof the bulk substrate layer different from the first region, the atleast one non-hetero semiconductor fin being integral with the bulksubstrate layer such that the material of the at least one non-heterosemiconductor fin is different from the epitaxial material.
 2. Thesemiconductor device of claim 1, further comprising an excess substrateportion between the at least one hetero semiconductor fins and the bulksubstrate layer.
 3. The semiconductor device of claim 2, wherein thematerial of the at least one non-hetero semiconductor fin, the bulksubstrate, and the excess substrate portion is silicon (Si).
 4. Thesemiconductor device of claim 3, wherein the epitaxial material issilicon germanium (SiGe).
 5. The semiconductor device of claim 1,wherein the at least one hetero semiconductor fin has a first heightdefined by a height of the epitaxial material and the at least onenon-hetero semiconductor fin has a second height that is different thanthe first height.
 6. The semiconductor device of claim 5, wherein thesecond height of the at least one non-hetero semiconductor fin isgreater than the first height of the at least one hetero semiconductorfin.
 7. The semiconductor device of claim 5, wherein the at least onehetero semiconductor fin has a first width defined by a width of theepitaxial material and the at least one non-hetero semiconductor fin hasa second width that is different than the first width.
 8. Thesemiconductor device of claim 7, wherein the second width of the atleast one non-hetero semiconductor fin is greater than the first widthof the at least one hetero semiconductor fin.
 9. The semiconductordevice of claim 5, wherein the epitaxial material of the at least onehetero semiconductor fin consists of silicon germanium (SiGe) to definea p-type field effect transistor.
 10. The semiconductor device of claim9, wherein the at least one non-hetero semiconductor fin consists ofsilicon (Si) to define an n-type field effect transistor.
 11. Asemiconductor device, comprising: a semiconductor substrate including abulk substrate layer that extends along a first axis to define a widthand a second axis perpendicular to the first axis to define a height; aplurality of hetero semiconductor fins including an epitaxial materialon a first region of the bulk substrate layer; and a plurality ofnon-hetero semiconductor fins on a second region of the bulk substratelayer different from the first region, the non-hetero semiconductor finsbeing integral with the bulk substrate layer such that the material ofthe non-hetero semiconductor fins is different from the epitaxialmaterial, wherein a first spacing between each hetero semiconductor finamong the plurality of hetero semiconductor fins is different than asecond spacing between each non-hetero semiconductor fin among theplurality of non-hetero semiconductor fins.
 12. The semiconductor deviceof claim 11, wherein the hetero semiconductor fins have a first heightdefined by a height of the epitaxial material and the non-heterosemiconductor fins have a second height that is different than the firstheight.
 13. The semiconductor device of claim 12, wherein the secondheight of the non-hetero semiconductor fins is greater than the firstheight of the hetero semiconductor fins.
 14. The semiconductor device ofclaim 11, wherein the hetero semiconductor fins have a first widthdefined by a width of the epitaxial material and the non-heterosemiconductor fins have a second width that is different than the firstwidth.
 15. The semiconductor device of claim 14, wherein the secondwidth of the non-hetero semiconductor fins is greater than the firstwidth of the hetero semiconductor fins.
 16. The semiconductor device ofclaim 15, wherein the second spacing between the non-heterosemiconductor fins is less than the first spacing between the heterosemiconductor fins.
 17. The semiconductor device of claim 14, whereinthe second width of the non-hetero semiconductor fins is less than thefirst width of the hetero semiconductor fins.
 18. The semiconductordevice of claim 17, wherein the wherein the second spacing between thenon-hetero semiconductor fins is greater than the first spacing betweenthe hetero semiconductor fins.
 19. The semiconductor device of claim 11,wherein the epitaxial material of the hetero semiconductor fins consistsof silicon germanium (SiGe) to define a p-type field effect transistor.20. The semiconductor device of claim 19, wherein the non-heterosemiconductor fins consist of silicon (Si) to define an n-type fieldeffect transistor.